Cryogenic Probe Stations

Cryogenic Probe Stations
Cryogenic Probe Stations Cryogenic Probe Stations Cryogenic Probe Stations Cryogenic Probe Stations Cryogenic Probe Stations Cryogenic Probe Stations Cryogenic Probe Stations Cryogenic Probe Stations

Cryogenic/cryogen-free and vacuum micro-manipulated probe stations   

Lake Shore Probe Stations   

Lake Shore Cryotronics have further extended their range of cryogenic/cryogen-free and vacuum micro-manipulated probe stations for testing the electronic and magneto-transport properties of chips, wafers, and packaged devices.

The 10 systems feature variable temperature operation, from 1.6 K to 675 K depending on model, and can accommodate up 4" wafers with up to 6 probes, again depending on model chosen.

Probes are available for use with signals ranging from DC to over 75 GHz and into the THz waveband depending on model chosen. A combination of both low and high frequency probes can be supplied with a single system.  Additionally, these systems can be configured with horizontal or vertical field superconducting magnets, high-resolution microscopes, and CCD cameras for precision positioning of the probe tips on the wafer or device under test.

Full specifications can be found in the full range catalogue downloadable from the Related Documents menu upper right.


Model PS-100

Table-top Cryogenic Probe Station

  • Four-arm triaxial TTPX configuration
  • High stability over the full TTPX temperature range
  • Configured for sensitive, high-impedance DC measurements
  • Accommodates samples up to 32 mm (1.25") in diameter
  • High-precsion micro-manipulated stages for probe tip placement
  • Includes Probe Starter Kit and Z70 microscope vision system with ring and coaxial lighting
  • Lake Shore Model 336 Temperature Controller supplied
  • Tabletop design with small footprint
  • Options and accessories for customisation to specific research needs

The PS-100 a pre-configured solution for customers needing a basic, low-cost cryogenic probe station. This packaged solution consists of a TTPX probe station set up for four-point triaxial probing, ideal for sensitive, high-impedance DC measurements.
 
The PS-100 is intended to offer a straightforward cryogenic probing solution without the complexity of choosing from multiple configuration options. The four arm triaxial scheme is the most commonly requested probe station configuration and serves many different applications. By pre-configuring these units, Lake Shore can take advantage of operational efficiency in manufacturing to offer a very competitive price and a lead time of just 3-4 weeks. The PS-100 has the same performance specifications as the existing TTPX and can be upgraded with standard TTPX options in the field.

Further details can be found in the product flyer downloadable from the Related Documents menu upper right.


Model TTPX

Table-top Probe Station

  • High stability operation from 4.2 K to 475 K
  • Optional temperature range from 3.2 K to 475 K or 20 K to 675 K
  • Ø 5 mm (0.2") optical access through the sample stage for backside illumination of the sample
  • Measurements from DC to 67 GHz
  • Accommodates up to 51 mm (2") diameter wafers
  • Configurable with up to six thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° theta planarisation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Tabletop design with small footprint
  • Options and accessories for customisation to specific research needs

The Model TTPX is a versatile table-top cryogenic micromanipulated probe station for testing full and partial wafers up to 51 mm (2") in diameter. Up to 6 ultra-stable micro-manipulated stages can be fitted, each providing precise 3-axis control of the probe position. Measurement of electrical, electro-optical, parametric, high Z, DC, RF, and the microwave properties of materials and test devices is possible through the wide selection of probes, cables, sample holders, and other options that make it possible to configure the TTPX to meet your specific measurement applications. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a TTPX.

 
 


Model CPX

High Performance Probe Station

  • High stability operation from 4.2 K to 475 K
  • Optional temperature range from 1.6 K to 400 K or 20 K to 675 K
  • Sample can be maintained at room temperature while system cools, reducing potential for condensation
  • Multiple radiation shields optimised to minimise cryogen consumption
  • Sample stage with ±5° in-plane rotation
  • Measurements from DC to GHz plus THz option
  • Optional high vacuum to 10-7 Torr
  • Optional load-lock assembly
  • Accommodates up to 51 mm (2") diameter wafers
  • Configurable with up to six thermally anchored micromanipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° theta planarisation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model CPX is a versatile cryogenic micromanipulated probe station used for testing of devices on full and partial wafers up to 51 mm (2") in diameter. Up to 6 ultra-stable micro-manipulated probe arms provide precise 3-axis control of the probe position to accurately land the probe tip on device features. The sample stage provides in-plane rotation to allow alignment of patterns with stage axes. The CPX can measure electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices via a wide selection of probes, cables, sample holders, and other options. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a CPX.

The CPX operates over a temperature range of 4.2 K to 475 K. With options, the base temperature can be extended down to 1.6 K. An optional interchangable high temperature sample stage provides a temperature range of 20 K to 675 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either helium or nitrogen. Vapour-cooled shielding optimises efficiency and intercepts blackbody radiation before it reaches the sample. A control heater on the sample stage along with the radiation shield heaters provide the probe station with fast thermal response.

For increased versatility, CPX options include a 1.6 K base temperature stage, a 675 K high temperature stage, high vacuum, load-lock assembly, vibration isolation systems, LN2 Dewar kit, higher magnification microscope, vacuum turbo pumping system, and fibre-optic probe arm modification.


Model CPX-VF

Superconducting Magnet-based Vertical Field Probe Station

  • 2.5 T (25 kOe) vertical field superconducting magnet
  • High stability operation from 2 K to 400 K
  • Sample can be maintained at room temperature while system cools, reducing potential for condensation
  • Multiple radiation shields optimised to minimise cryogen consumption
  • Sample stage with ±5° in-plane rotation
  • Measurements from DC to 67 GHz, plus THz option
  • Optional high vacuum to 10-7 Torr
  • Accommodates up to 51 mm (2") diameter wafers
  • Configurable with up to six thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° theta planarisation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model CPX-VF is a variant of the CPX above but mounted on a non-magnetic table and equipped with a 2.5 T (25 kOe) vertical field superconducting magnet. The CPX-VF operates over a temperature range of 4.2 K to 400 K. With options, the base temperature can be extended down to 2 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either liquid helium or liquid nitrogen. Vapour-cooled shielding optimises efficiency and intercepts blackbody radiation before it reaches the sample. A control heater on the sample stage along with the magnet stage and radiation shield heaters provides the probe station with fast thermal response.

For increased versatility, CPX-VF options include a 2 K base temperature stage, high vacuum, vibration isolation systems, LN2 Dewar kit, higher magnification microscope, vacuum turbo pumping system, and fibre-optic probe arm modification.


Model CPX-HF

Superconducting Magnet-based Horizontal Field Probe Station

  • 1 T (10 kOe) horizontal field superconducting magnet
  • High stability operation from 2 K to 400 K
  • Sample can be maintained at room temperature while system cools, reducing potential for condensation
  • Multiple radiation shields optimised to minimise cryogen consumption
  • Sample stage with ±5° in-plane rotation
  • Measurements from DC to 67 GHz
  • Optional high vacuum to 10-7 Torr
  • Accommodates up to 25 mm (1") diameter wafers
  • Configurable with up to four thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° theta planarisation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model CPX-HF is a variant of the CPX but mounted on a non-magnetic table and equipped with a 1 T (10 kOe) horizontal split-pair superconducting magnet. The CPX-HF operates over a temperature range of 4.2 K to 400 K but, with options, the base temperature can be extended down to 2 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either liquid helium or nitrogen. Vapour-cooled shielding optimises efficiency and intercepts blackbody radiation before it reaches the sample. A control heater on the sample stage along with the magnet stage and radiation shield heaters provides the probe station with fast thermal response.

The CPX-HF is user configured with up to four ultrastable micro-manipulated stages, each providing precise 3-axis control of the probe position to accurately land the probe tip on device features. Proprietary probe tips in a variety of sizes and materials minimise thermal mass and optimise electrical contacts to the device under test. For increased versatility, CPX-VF options include high vacuum, vibration isolation systems, LN2 Dewar kit, higher magnification microscope, vacuum turbo pumping system, and fibre-optic probe arm modification.


Model EMPX-H2

Electromagnet-based Horizontal Field Probe Station

  • 0.6 T (6.0 kOe) horizontal (in-plane) field electromagnet
  • 360° sample stage rotation option
  • High stability operation from 3.2 K to 400 K
  • Measurements from DC to 67 GHz
  • Accommodates up to 25 mm (1") diameter wafers
  • Configurable with up to four thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° theta planarisation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model EMPX-H2 is a versatile cryogenic electromagnet-based micro-manipulated probe station used for nondestructive testing of devices on full and partial wafers up to 25 mm (1") in diameter. The EMPX-H2 can measure magneto-transport, electrical, electrooptical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, semiconductors, superconductors, and spintronic devices are typical materials measured in an EMPX-H2. A wide selection of probes, cables, sample holders, and options makes it possible to configure the EMPX-H2 to meet your specific measurement applications.

The EMPX-H2 is equipped with a 0.6 T (6.0 kOe) horizontal (in-plane) field electromagnet and operates over a temperature range of 4.5 K to 400 K. With options, the base temperature can be extended down to 3.2 K. The EMPX-H2 is user configured with up to four ultra-stable micro-manipulated stages, each providing precise 3-axis control of the probe position. A 360° sample stage rotation option allows measurement of angular-dependent and anisotropic magneto-transport properties. For increased versatility, EMPX-H2 options include an LN2 Dewar kit, vacuum turbo pumping system, pump-line vibration isolator, recirculating chillers, and fibre-optic probe arm modification.


Model FWPX

Large Wafer Probe Station

  • High stability operation from 3.5 K to 475 K
  • Measurements from DC to 67 GHz
  • Accommodates up to 102 mm (4") diameter wafers
  • Configurable with up to six thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° theta planarisation
  • Sample stage with in-plane translation and ±5° in-plane rotation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model FWPX is a versatile cryogenic micro-manipulated probe station used for nondestructive testing of devices on full and partial wafers up to 102 mm (4") in diameter. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a FWPX. A wide selection of probes, cables, sample holders, and options makes it possible to configure the FWPX to meet your specific measurement applications.

The FWPX operates over a temperature range of 4.5 K to 475 K or, with options, the base temperature can be extended down to 3.5 K. Measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices can be made via up to six user-configured ultra-stable micro-manipulated stages, each providing precise 3-axis control of the probe position. The sample stage provides in-plane translation and rotation to allow alignment of patterns with stage axes. Proprietary probe tips in a variety of sizes and materials minimise thermal mass and optimise electrical contacts to the device under test (DUT). Probe tips are thermally linked to the sample stage to minimise heat transfer to the DUT.


Model CRX-6.5K

Affordable Cryogen-free Probe Station

  • Closed cycle refrigerator provides high stability cryogen-free operation from <10 K to 350 K
  • Optional temperature range from 20 K to 675 K
  • Probes thermally anchored to the sample stage cooled to < 20 K at base temperature
  • Probe arm sensor for monitoring probe temperature
  • Control stability to 10 mK
  • Low vibration design: < 2 µm at sample stage
  • Measurements from DC to 67 GHz
  • Sample holders optimised for low noise, high frequency, or high impedance measurements
  • Accommodates up to 51 mm (2") diameter wafers
  • Configurable with up to six thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° planarisation

The Model CRX-6.5K is a low cost cryogen-free micro-manipulated probe station for testing of devices on full and partial wafers up to 51 mm (2") in diameter. Based on a Sumitomo 6.5 K base temperature CCR, the CRX-6.5K provides efficient temperature operation and control over a temperature range of <10 K to 350 K without the operating expense of liquid cryogens. An optional interchangeable high temperature sample stage provides a temperature range of 20 K to 675 K.

Careful design provides a low vibration, user-friendly tool. Integrated vibration isolation and damping prevents CCR mechanical vibration from affecting measurement performance. Sample stage vibration is limited to less than 2 µm (X, Y, and Z axes) through the full-scale temperature range. The CRX-6.5K is user configured with up to six ultra-stable micro-manipulated probe arms, each providing precise 3-axis probe position control. Each probe can also be rotated ±5° about its axis (planarised) to ensure multi-tip probes are properly aligned with the sample. DC measurements can be optimised for low-noise, high-impedance (low leakage), or high-thermal contact to the device under test (DUT). RF measurements include configurations up to 67 GHz. Optical sources can be introduced through viewport windows or optional fibre-optic probe arm modification.


Model CRX-4K

High Performance Close Cycle Refrigerator-based Probe Station

  • Closed cycle refrigerator provides high stability cryogen-free operation from 4.5 K to 350 K
  • Optional temperature range from 20 K to 675 K
  • Control stability to 10 mK
  • Sample exchange cycle time of < 3.5 h
  • Low vibration design: < 1 µm at sample stage (X, Y, and Z axes)
  • Measurements from DC to 67 GHz, plus THz option
  • Sample holders optimised for low noise, high frequency, or high impedance measurements
  • Accommodates up to 51 mm (2") diameter wafers
  • Configurable with up to six thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° theta planarisation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model CRX-4K is a versatile cryogen-free micro-manipulated probe station used for testing full and partial wafers up to 51 mm (2") in diameter. Based on a Sumitomo 4 K base temperature CCR, the CRX-4K provides efficient temperature operation and control over a temperature range of 4.5 K to 350 K without the operating expense of liquid cryogens. An optional interchangeable high temperature sample stage provides a temperature range of 20 K to 675 K.

The CRX-4K is user configured with up to six ultra-stable micromanipulated probe arms, each providing precise 3-axis probe position control to land the probe tip accurately on device features. Each probe can also be rotated ±5° about its axis (planarised) to ensure multi-tip probes are properly aligned with the sample. DC measurements can be optimised for low noise, high-impedance (low leakage), or high-thermal contact to the device under test (DUT). RF measurements include configurations up to 67 GHz and a THz option. Optical sources can be introduced through viewport windows or optional fibre-optic probe arm modification. Proprietary probe arms in a variety of sizes and materials minimise thermal mass and optimise electrical contact to the DUT. In addition, probe tips are thermally linked to the sample stage to minimise heat transfer to the DUT.


Model CRX-VF

Cryogen-free Vertical Field Superconducting Magnet-based Probe Station

  • 2.5 T (25 kOe) vertical field superconducting magnet
  • Closed cycle refrigerator provides high stability cryogen-free operation from 10 K to 500 K
  • Control stability to 10 mK
  • Low vibration design: <1 µm at sample stage (X, Y, and Z axes)
  • Measurements from DC to 67 GHz, plus THz option
  • Sample holders optimised for low noise, high frequency, or high impedance measurements
  • Accommodates up to 51 mm (2") diameter wafers
  • Configurable with up to six thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° planarisation
  • Optional Hall effect measurement capability with Lake Shore 8400 Series
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model CRX-VF is a versatile cryogen-free micro manipulated probe station used for testing of devices on full and partial wafers up to 51 mm (2") in diameter. A wide selection of probes, cables, sample holders, and options makes it possible to configure the instrument to meet specific measurement applications.

Using a single Sumitomo 4 K base temperature CCR, the CRX-VF is equipped with a vertical field superconducting magnet capable of a maximum 2.5 T (25 kOe). It provides efficient temperature operation and control over a temperature range of 10 K to 500 K without the operating expense of liquid cryogens. Each cryogenic stage is equipped with a sensor and heater to provide fast thermal response and rapid warm up for sample exchange. Actively cooled shielding intercepts blackbody radiation before it reaches the sample, ensuring small thermal gradients.

The CRX-VF is user configured with up to six ultra-stable micro-manipulated probe arms, each providing precise 3 axis probe position control. Each probe can also be rotated ±5° about its axis (planarised) to ensure multi-tip probes are properly aligned with the sample. DC measurements can be optimised for low-noise, high-impedance (low leakage), or high-thermal contact to the device under test (DUT). RF measurements include configurations up to 67 GHz and a THz option. An optional Hall effect measurement capability can be provided with the addition of Lake Shore 8400 Series instrumentation and software.

Optical sources can be introduced through viewport windows or optional fibre-optic probe arm modification. CPX-VF options include a 2 K base temperature stage, high vacuum, vibration isolation systems, LN2 Dewar kit, higher magnification microscope, vacuum turbo pumping system, and fibre-optic probe arm modification.


Model CRX-EM-HF

Cryogen-free Horizontal Field Electromagnet Probe Station

  • 0.6 T (6.0 kOe) horizontal (in-plane) field electromagnet
  • Closed cycle refrigerator provides high stability cryogen-free operation from 8 K to 400 K
  • Control stability to 10 mK
  • Sample exchange cycle time of < 4.5 h
  • Low vibration design: < 1 µm at sample stage (X, Y, and Z axes)
  • 360° sample stage rotation option
  • Measurements from DC to 67 GHz
  • Accommodates up to 25 mm (1") diameter wafers
  • Configurable with up to four thermally anchored micro-manipulated probe arms
  • Probe arms with 3-axis adjustments and ±5° planarisation
  • Cables, shields, and guards minimise electrical noise and thermal radiation losses
  • Options and accessories for customisation to specific research needs

The Model CRX-EM-HF is a new versatile cryogen-free electromagnet-based micro manipulated probe station for full and partial wafers up to 25 mm (1") in diameter. Based on a Sumitomo 4 K base temperature CCR, the CRX-EM-HF is equipped with a 0.6 T (6.0 kOe) horizontal (in-plane) field electromagnet. It provides efficient temperature operation and control over a temperature range of 8 K to 400 K without the operating expense of liquid cryogens. An optional interchangeable high temperature sample stage provides a temperature range of 20 K to 500 K.

Careful design provides a low vibration, user-friendly tool. Integrated vibration isolation and damping prevents mechanical vibration from affecting measurement performance. Sample stage vibration is limited to less than 1 µm (X, Y, and Z axes) through the full-scale temperature range.

The CRX-EM-HF is user configured with up to four ultra-stable micro-manipulated stages, each providing precise 3-axis control of the probe positions. Each probe can also be rotated ±5° about its axis (planarised) to ensure multi-tip probes are properly aligned with the sample. The 360° sample stage rotation option allows measurement of angular-dependent and anisotropic magneto-transport properties of the DUT. Proprietary probe tips in a variety of sizes and materials minimise thermal mass and optimise electrical contacts to the DUT. Probe tips are thermally linked to the sample stage to minimise heat transfer to the DUT.


Cryogenic Probe Station product page on manufacturer's website.

Product Code: Lake Shore Cryogenic Probe Stations

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