Rotational / 'Tip & Tilt' Nanopositioners

Rotational / 'Tip & Tilt' Nanopositioners

Rotational and 'Tip & Tilt' nanopositioners   

Mad City Labs Rotational and 'Tip & Tilt' Nanopositioners   

Series Summary

Nano-Theta Rotational stage for wafer mask and optical alignment with sub-µrad resolution
Nano-ThetaH   Unique high-precision rotational stage offering 5 mrad of motion and large optical aperture
Nano-M3Z 3-axis nanopositioner with 25 µm Z-axis motion and 1 mrad in θx & θy
Nano-MTA Mirror tip/tilt actuators for rapid scanning of laser beams with sub-microradian resolution
Nano-Align3 3-axis nanopositioner with 100 µm Z-axis motion and 2 mrad in θx & θy
Nano-Man5 5-axis nanopositioning system
Nano-Align5 5-axis (X, Y, Z, θx & θy) large aperture nanopositioner series
Nano-Align6 6-axis (X, Y, Z, θx, θy & θz) large aperture nanopositioner series


Each Mad City Labs nanopositioning stage is delivered with a factory-paired Nano-Drive controller. This ensures a calibrated system which is optimised for the chosen stage and other factors such as load and positioning speeds.

PDF 2D line drawings for the following nanopositioners and the full 132-page Mad City labs catalogue can be downloaded from the Related Documents menu to the right.

Nano-Theta

Ideal for applications in Laser Beam Scanning, Lithography, FBG Writing and Interferometry

The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing and laser beam tracking or scanning.
 
The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control.

Specifications
Range of Motion (mrad) 2
Resolution (nrad) 4
Resonant Freq. (kHz)*   2

Mad City Labs Nano-Theta

  • Precision rotation: 2 milliradians range
  • Accessible and well defined axis of rotation
  • Mount in any orientation
  • High resolution: 4 nanoradians
  • Closed loop control

Nano-Theta/H

Ideal for applications in Precision Alignment, Lithography, FBG Writing and Polarised Nanoscopy

The Nano-Theta/H is a unique, high precision rotational stage which provides 5 milliradians of total motion and a large centre aperture for optical access. The innovative design of the Nano-Theta/H allows it to be combined with other multi-axis nanopositioning stages for the ultimate flexibility in sample alignment - see the Nano-Align6 Series.
 
Internal position sensors utilising the proprietary PicoQ® technology provide absolute, repeatable position measurement with nanoradian resolution under closed loop control.

Specifications
Range of Motion (mrad) 5
Resolution (nrad) 10
Resonant Freq. (kHz)*   0.3
Load Capacity (kg) 0.5 Horz.
0.2 Vert.

Mad City Labs Nano-Theta/H

  • Precision rotation: 5 milliradians range
  • Large centre aperture
  • Mount in any orientation
  • High resolution: 10 nanoradians
  • Closed loop control

Nano-M3Z

Ideal for applications in Nanolithography, Metrology and Nano-alignment

The Nano-M3Z is a compact, three axis (Z, θx, θy) nanopositioning system with a 6.4 mm / 0.25" centre aperture. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted and the application demands precise alignment capabilities.
 
The center aperture provides an optical path for laser interferometry or tracking. Nano-M3Z's can be constructed from aluminium or from Invar™ to reduce themal expansion effects.
 
Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with picometre and nanoradian accuracy under closed loop control.
 
A related model, the Nano-Man5, adds linear X and Y motion to the the Z-axis capabilities of the Nano-M3Z.

Specifications
Range of Motion Z: 25 µm
X & Y: 1 mrad
Resolution Z: 0.05 nm
X & Y: 2 nrad
Resonant Freq. (kHz)*   0.7
Load Capacity (kg) 0.5 Horz.
0.2 Vert.

Mad City Labs Nano-M3Z

  • Z-axis with tip & tilt alignment (Z, θx & θy)
  • Compact, low-profile 20 mm (0.8") design
  • Centre aperture: 6.4 mm (0.25") diameter
  • Closed loop control

Nano-MTA

Ideal for applications in High Speed Beam Steering, Optical Trapping, and Active Optics

The Nano-MTA Series are single axis and two axis piezoelectric 25 mm diameter mirror tip/tilt actuators. With nanoradian resolution, the Nano-MTA Series is ideal for applications involving laser beam steering, tracking, and scanning. For example, Nano-MTA units are installed within the successful LIGO gravity wave detector experiment.
 
The Nano-MTA Series is compatible with either the Nano-Drive® or Nano-Drive®85 controllers. Both controllers include sensor electronics, proportional integral feedback control, and 150 V amplifiers.
 
When used with the high power Nano-Drive®85 controller, the Nano-MTA Series is capable of continuous, high speed scans at 400 Hz and step response times down to 2 milliseconds. Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control.

Specifications
Range of Motion 2.0 mrad per axis
5.0 mrad (extended)
Resolution 4.0 nrad
10.0 nrad (extended)
Resonant Freq. (kHz)*   X: (2/5 mrad)  3.2/2.8
Y: (2/5 mrad)  1.25/0.8
Scanning Speed (Hz) 400

Mad City Labs Nano-M3Z

  • Up to 400 Hz high speed scans
  • One or two axis motion
  • 2 mrad or 5 mrad ranges of motion
  • Mount in any orientation
  • Closed loop control
  • High stability

Nano-Align3 Series

Ideal for applications in Nanolithography, Microscopy and MEMS

The Nano-Align3 is a three axis (Z, θx & θy) nanopositioning system with a large centre aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted while the centre aperture makes it ideal for demanding microscopy alignment applications that require long-range high-precision travel.
 
Internal position sensors utilising proprietary PicoQ® technology provide picometre and nanoradian precision under closed loop control.

Specifications
Range of Motion Z: 100 or 200 µm
X & Y: 2 or 4 mrad
Resolution Z: 0.2 or 0.4 nm
X & Y: 4 or 8 nrad
Resonant Freq. (kHz)* 0.60 or 0.45
Load Capacity (kg) 0.5 Horz.
0.2 Vert.

Mad City Labs Nano-Align3

  • Z-axis with tip & tilt alignment (Z, θx & θ)
  • Low profile: 20 mm (0.8")
  • Large centre aperture: 66 mm2 (2.6" Sq.)
  • Long range: 100 or 200 µm (Z), 2 or 4 mrad
  • Closed loop control

Nano-Man5

Ideal for applications in Alignment, MEMS, Nanolithography and SEM

The Nano-Man5 is a five axis (X, Y, Z, θx, θy) nanopositioning system with a 0.252 diameter centre aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM.
 
The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with tip & tiltx, θy).
 
Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with picometre and nanoradian accuracy under closed loop control.
 
The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.

Specifications
Range of Motion  X & Y: 50 µm
Z: 25 µm
θx & θy: 1 mrad
Resolution (nm) X & Y: 0.10 nm
Z: 0.05 nm
θx & θy: 2 nrad
Resonant Freq. (kHz)* X: 1.0
Y & Z: 0.7
Load Capacity (kg) 0.2

Mad City Labs Nano-Man5

  • Five axis motion (XYZ, θx, θy)
  • 50 x 50 x 25 µm + 1 x 1 mrad ranges of motion
  • Centre aperture: 6.4 mm (0.25")
  • Compact size
  • Closed loop control

Nano-Align5 Series

Ideal for applications in Alignment, MEMS, Nanolithography and Metrology

The Nano-Align5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with tip & tiltx, θy). The large centre aperture provides excellent access for microscopy optics, sample holders and probe placement.
 
The aluminium-bodied Nano-Align5 includes internal sensors with proprietary PicoQ® technology for absolute position measurement and picometre/nanoradian accuracy under closed loop control.
 
The Nano-Align5 can be combined with the MicroStage or Manual MicroStage for long range micropositioning.

Specifications
Ranges of Motion (µm)  See datasheet
Resolution (nm) See datasheet
Resonant Freq. (kHz)*   See datasheet
Load Capacity (kg) 0.5 Horz.
0.2 Vert.

Mad City Labs Nano-Align5

  • Low profile, 5-axis motion (XYZ, θx, θy)
  • XYZ motion range: 100, 200 or 300 µm
  • θ motion range:
    Up to 3.3 mrad motion in x & up to 4.5 mrad in y
  • Centre aperture: 66 mm2 (2.6" Sq.)
  • Closed loop control

Nano-Align6 Series

Ideal for applications in Alignment, MEMS, Nanolithography and Metrology

The Nano-Align6 is a six axis (X, Y, Z, θx, θy, θz) nanopositioning system with a large centre aperture ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis.
 
The 35 mm diameter aperture provides excellent access for microscopy optics, sample holders and probe placement.
 
The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQ® technology for absolute position measurement and picometre/nanoradian accuracy under closed loop control.

Specifications
Ranges of Motion (µm)  See datasheet
Resolution (nm) See datasheet
Resonant Freq. (kHz)*   See datasheet
Load Capacity (kg) 0.5 Horz.
0.2 Vert.

Mad City Labs Nano-Align6

  • Six axis motion (XYZ, θx, θy, θz)
  • Low profile with choice of motion ranges
  • 35 mm diameter centre aperture
  • Closed loop control


* All resonant frequency measurements have a ± 20% margin of error

Mad City Labs website.

Product Code: Mad City Labs Rotational / 'Tip & Tilt' Nanopositioners

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