Single Axis Nanopositioners

Single Axis Nanopositioners

Sub-nanometre resolution piezo-driven single axis stages   

Mad City Labs Single Axis Nanopositioners  

Series Summary

Nano-METx Picometre resolution compact nanopositioner
Nano-LR200 200 µm with ultra-low out-of-plane motion
Nano-Mini 10 µm miniature nanopositioner
Nano-OP Up to 100 µm with sub-nanometre resolution
Nano-OPH Up to 100 µm with sub-nanometre resolution plus central 33 mm aperture
Nano-P Up to 70 µm precision cylindrical translator
Nano-SPMZ Micro- and high-res nanopositioner in a compact unit
Nano-YT500   500 µm central aperture precision nanopositioner
Nano-HL High-precision nanopositioner for loads up to 10 kg


Each Mad City Labs nanopositioning stage is delivered with a factory-paired Nano-Drive controller. This ensures a calibrated system which is optimised for the chosen stage and other factors such as load and positioning speeds.

PDF 2D line drawings for the following nanopositioners and the full 132-page Mad City labs catalogue can be downloaded from the Documents menu to the right.

Nano-METx

Ideal for applications in High-speed and High-resolution positioning, Metrology, AFM and SPM

The Nano-MET10 and Nano-MET20 are compact, single axis nanopositioning systems with exceptional resonant frequency and low noise characteristics. The Nano-MET10 and Nano-MET20 have picometre positioning resolution. Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control.
 
The low noise characteristics and high resonant frequencies make it ideal for demanding metrology applications that require noise floors less than 10 picometers and high speed performance. Related products include the Nano-METZ, Nano-MET2 and Nano- MET3 nanopositioning systems.

Specifications
Range of Motion (µm)   MET10: 10   MET20: 20
Resolution (nm) MET10: 0.01   MET20: 0.02
Resonant Freq. (kHz) 4.6
Load Capacity (kg) 0.1

Mad City Labs Nano-MET10

  • Compact footprint
  • Single axis - 10 or 20 microns
  • Closed loop control
  • Ultra-low noise performance
  • Picometre positioning resolution
  • High speed

Nano-LR200

Ideal for applications in Metrology, Atomic Force Microscopy and MEMS

The Nano-LR200 is designed to provide long range, single-axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano-LR200 ensures less than 5 nm of out-of-plane motion is measurable over the entire moving platform throughout the 200 µm range of motion.
 
The Nano-LR200 sets the highest level of single-axis precision and positioning performance. Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with sub-nanometre accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism.

Specifications
Range of Motion (µm) 200
Resolution (nm) 0.4
Resonant Freq. (kHz)*   0.5
Load Capacity (kg) 0.5 Horz.
0.2 Vert.

Mad City Labs Nano-LR200

  • Long range single axis motion: 200 µm
  • Less than 5 nm out of plane motion
  • Low profile design
  • Closed loop control

Nano-Mini

Ideal for applications in Precision Metrology and Microscopy

The Nano-Mini is one of the smallest flexure guided nanopositioning stages available. Designed for optimum performance on a small footprint, this stage uses an innovative mini-cross section multilayer piezo ceramic which allows for a stiff stage to translate 10 microns with picometre precision. Available in titanium or Invar™.

Specifications
Range of Motion (µm)  10
Resolution (nm) 0.02
Resonant Freq. (kHz)*   1.5 ± 20%
Load Capacity (kg) 0.5 Horz.
0.15 Vert.

Mad City Labs Nano-Mini

  • Ultra small footprint: 1" x 1.5"
  • Stackable for XY motion
  • Closed loop control
  • Titanium or Invar™ construction

Nano-OP Series

Ideal for applications in Interferometry, Nanomanipulation and Lens Focusing

The Nano-OP Series is a versatile group of compact nanopositioners which can be configured to fit into a wide variety of applications.
 
Individual single-axis stages may be combined to form multi-axis systems. The Nano-OP Series are available with 30, 65, and 100 micron ranges of motion. They can be constructed from aluminium, Invar™ or titanium and can be customised to suit unique requirements.
 
Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with picometre accuracy under closed loop control.

Specifications
Range of Motion (µm)  OP30: 30 
OP65: 65
OP100: 100
Resolution (nm) OP30: 0.06
OP65: 0.13
OP100: 0.2
Resonant Freq. (kHz)*   4.0
Load Capacity (kg) 1.0 Horz.
0.5 Vert.

Mad City Labs Nano-OP Series

  • High speed, direct drive
  • Stackable for multi-axis motion
  • 30, 65, and 100 µm ranges of motion
  • Up to 70 µm motion
  • Closed loop control

Nano-OPH Series

Ideal for applications in Nanomanipulation, AFM, NSOM, and specialised microscopy

Like the Nano-OP Series, the Nano-OPH Series is a versatile group of compact single axis nanopositioners which can be configured to fit into a wide variety of applications. The addition of a 1.3 inch diameter aperture through the stage makes the Nano-OPH especially useful for precise motion in optical experiments.
 
Individual, single axis stages may be combined to form multi-axis systems. The Nano-OPH Series is available with 30, 50, and 100 micron ranges of motion. They can be constructed from aluminium, Invar™ or titanium and can be customised to suit unique requirements.
 
Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with picometre accuracy under closed loop control.

Specifications
Range of Motion (µm)  OPH30: 30 
OPH50: 65
OPH100: 100
Resolution (nm) OPH30: 0.06
OPH50: 0.10
OPH100: 0.20
Resonant Freq. (kHz)*   3.5
Load Capacity (kg) 1.0 Horz.
0.5 Vert.

Mad City Labs Nano-OP Series

  • High speed, direct drive
  • Stackable for multi-axis motion
  • 30, 50, and 100 µm ranges of motion
  • Closed loop control

Nano-P Series

Ideal for applications in Surface Analysis and Metrology

The Nano-P Series of positioners are piezo-actuated closed-loop linear translators. Incorporating a unique flexure hinge machined entirely from a single block of high strength titanium, this design is available for the first time on a tubular nanopositioner ensuring the highest degree of repeatability and load capability.
 
The guiding mechanism of the Nano-P Series eliminates mechanical friction and stiction and offers the best thermal stability and mechanical strength from its combined Invar™ and titanium construction. This makes it ideal for the most demanding positioning and metrology applications.
 
The Nano-P Series is available in three standard ranges of motion with integrated position sensors utilising proprietary PicoQT technology to provide absolute, repeatable position measurement with picometre accuracy under closed loop control.

Specifications
Range of Motion (µm)  P15: 15
P35: 35
P70: 70
Resolution (nm) P15: 0.03
P35: 0.07
P70: 0.14
Resonant Freq. (kHz)*   2.5
Load Capacity (kg) 0.2
Custom systems available

Mad City Labs Nano-P Series

  • Compact tubular design
  • True flexure guided motion
  • Position sensors, closed loop control
  • Up to 70 µm motion
  • Invar™ and titanium construction
  • Closed loop control

Nano-SPMZ

Ideal for applications in Nano-indenting, Nanomanipulation and Nano-ergonometry

The Nano-SPMZ integrates a single-axis micropositioner with a high-resolution nanopositioner, forming a compact unit which is compatible with optical tables and standard mounting accessories.
 
A stepper motor controls the coarse positioning over a 25 mm range with a minimum step size of 95 nm. A high resolution linear encoder incorporated into this stage continuously monitors positions down to 20 nm. The ultimate positioning resolution of 60 picometres is achieved by the nanopositioner over a 30 micron range thanks to the stability of the proprietary PicoQ® position feedback sensors.
 
Samples and probes can be mounted on the end of the nanopositioner (see the round disk in photo) or on the top face. A special Nano-Drive®SPMZ closed loop controller accepts feedback from external sensors (such as force sensors) as well as standard feedback from the nanopositioner's internal position sensors. Seamlessly switching between feedback signals gives an unusual versatility to this unique system.
 
The USB digital interface provides direct PC control of the micropositioner and nanopositioner as well as access to the linear encoder, position sensor and external sensor readings.

Specifications
Range of Motion Coarse: 25 mm 
Fine: 30 µm
Resolution Coarse: 95 nm
Fine: 0.06 nm
Resonant Freq. (kHz)*   4.0
Load Capacity (kg) 1.0 Horz.
0.5 Vert.

Mad City Labs Nano-SPMZ

  • Single axis Micro and Nanopositioning
  • 25 mm coarse motion with hi-res encoder
  • 30 micron nanopositioning
  • Alternate external sensor feedback
  • Closed loop control

Nano-YT500

Ideal for applications in Inspection, Quality Control and Metrology

The Nano-YT500 is a long range, single axis, precision nanopositioning system with a central aperture well suited for optical scanning of samples. Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with nanometre resolution under closed loop control.
 
True flexure guided motion of the Nano-YT500 minimises the end-to-end differences in travel across the aperture to less than 1 µm over the full 500 µm range of motion (0.2%).
 
The Nano-YT500 can be operated in any orientation and has been tested for reliability over 1 million full cycles (1000 µm total travel per cycle).

Specifications
Range of Motion (µm) 500
Resolution (nm) 1.0
Resonant Freq. (kHz)*   0.15
Load Capacity (kg) 0.5 Horz.
1.0 Vert.

Mad City Labs Nano-YT500

  • Single axis motion
  • Long range - 500 µm
  • Compact size
  • Rectangular aperture
  • Closed loop control

Nano-HL Series

Ideal for applications requiring precise positioning of heavy optics or sensor assemblies

The Nano-HL Series single-axis stages are heavy-duty nanopositioners designed to carry loads weighing up to 10 kg. Built from a single block of aluminium nearly 50 mm thick, the Nano-HL has enough physical rigidity to counteract large off-axis loads while continuing to produce precise, high resolution movements.
 
The Nano-HL Series stages can be operated in any orientation and may be customised to fit specific installations and special mounting requirements.
 
Internal position sensors utilising proprietary PicoQ® technology provide absolute, repeatable position measurement with sub-nanometre resolution under closed loop control.

Specifications
Range of Motion (µm)  HL50: 50
HL100: 100
HL200: 200
Resolution (nm) HL50: 0.1
HL100: 0.2
HL200: 0.4
Resonant Freq. (kHz)*   0.45
Load Capacity (kg) 10 Horz. & Vert.
Custom systems available

Mad City Labs Nano-HL Series

  • Heavy load capacity - up to 10 kg
  • Single-axis motion
  • Long range motion - up to 200 µm
  • Closed loop control


 
* All resonant frequency measurements have a ± 20% margin of error
 

Mad City Labs website.

Product Code: Mad City Labs Single Axis Nanopositioners

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