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Dynamic characterisation of MEMS and MOEMS

Dynamic characterisation of MEMS and MOEMS
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Dynamic characterisation of MEMS and MOEMS
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Investigating the static and dynamic characteristics of a micro-mirror   

Dynamic characterisation of MEMS and MOEMS   

Dynamic characterisation of MEMS and MOEMS

MEMS and MOEMS developments often require interferometric resolution of both their static and dynamic characteristics. This can be achieved through optical anlaysis using digital holographic microscopy. This paper details the investigation of resonant frequencies of a dual axis micro-mirror and the determination of the linear, non-linear, and modal resonance zones of its dynamic response.

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