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Triple-Axis Nanopositioners (Deep Z-motion)

Triple-Axis Nanopositioners (Deep Z-motion)
Triple-Axis Nanopositioners (Deep Z-motion)
Triple-Axis Nanopositioners (Deep Z-motion)
Triple-Axis Nanopositioners (Deep Z-motion)
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Triple-Axis Nanopositioners (Deep Z-motion)
Triple-Axis Nanopositioners (Deep Z-motion)
Triple-Axis Nanopositioners (Deep Z-motion)
Triple-Axis Nanopositioners (Deep Z-motion)
Triple-Axis Nanopositioners (Deep Z-motion)
  • Stock: 4 to 6 weeks
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  • Model: nPoint Triple-Axis Nanopositioners (Deep)
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XYZ nanopositioning piezo stages with deep Z-motion   

nPoint Triple Axis Nanopostioners (Up to 135 µm Z-motion)   

This range of nPoint 3-axis piezo stages operate with up to 135 µm of Z-motion in open loop mode, and incorporate a unique flexure-guided design to ensure high resonant frequencies while minimising orthogonality and cross-talk errors.

nPoint's nanopositioners are especially designed for numerous motion critical applications. These include scanning and position control in nanolithography, atomic force microscopy (AFM), biophysics, and optical focusing.

Flexible DSP controllers enable easy optimisation and configuration of piezo systems for a variety of applications.

XYZ ModelsNPXY100
Z50-244
NPXY200
Z50-270
NPXY100
Z100-135
NPXY200
Z100-271
Up to 135 µm of open loop Z-motion
Key features:Large aperture XYZ nanopositioning piezo stages developed for scanning probe and optical microscopy applications
Footprint (mm)140 x 140
Height (mm)38
Aperture (mm)68 x 68
Body MaterialAluminium
Maximum Load (kg)5
Stage Mass (kg)1.091.060.950.99
Max Push/Pull Force (N)100/20
Closed-loop Travel (µm)
  X- & Y-axes:
  Z-axis:

100
50

200
50

100
100

200
100
Open-loop Travel* (µm)
  X- & Y-axes:
  Z-axis:

160
80

240
80

175
135

240
135
Position Noise (nm)
  X- & Y-axes
  Z-axis

0.3
0.3

0.7
0.3

0.3
0.3

0.7
0.3
Stiffness (N/µm)
  X-axis
  Y-axis
  Z-axis

1.6
1.6
4.7

1.0
1.8
4.7

1.3
1.3
5.6

1.5
2.0
5.6
Resonant Freq. (kHz)
  X- & Y-axes
  Z-axis

0.50
0.55

0.45
0.55

0.50
0.50

0.45
0.50
Linearity Deviation (%)
  X- & Y-axes
  Z-axis

0.01
0.05

0.01
0.02

0.01
0.05

0.01
0.02
Settling Time (ms)
  X- & Y-axes
  Z-axis

10
10

15
10

10
10

15
10
Capacitance (µF)
  X- & Y-axes
  Z-axis

4.8
4.8

7.5
4.8

4.8
5.5

7.5
5.5
2
Integrated SensorCapacitive
ControllerLC.403
Notes* Open-loop Travel operating at -30 to 150 V

 

Standard stage materials are listed. Other materials, including invar, super invar, stainless steel, titanium, and aluminum, are available for some stages. UHV configurations are also available in most products. Please enquire if interested in these options.


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