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Triple-Axis Nanopositioners (Shallow Z-motion)

Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
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Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
Triple-Axis Nanopositioners (Shallow Z-motion)
  • Stock: 4 to 6 weeks
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  • Model: nPoint Triple-Axis Nanopositioners (Shallow)
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XYZ nanopositioning piezo stages with shallow Z-motion   

nPoint Triple Axis Nanopostioners (Up to 35 µm Z-motion)   

This range of nPoint 3-axis piezo stages have up to 35 µm of open loop Z-motion, and incorporate a unique flexure-guided design to ensure high resonant frequencies while minimising orthogonality and cross-talk errors.

nPoint's nanopositioners are especially designed for numerous motion critical applications. These include scanning and position control in nanolithography, atomic force microscopy (AFM), biophysics, and optical focusing.

Flexible DSP controllers enable easy optimisation and configuration of piezo systems for a variety of applications.

Standard stage materials are listed. Other materials, including invar, super invar, stainless steel, titanium, and aluminum, are available for some stages. UHV configurations are also available in most products. Please enquire if interested in these options.

XYZ ModelsNPXY100
Z10-128
NPXY200
Z10-269
NPXY50
Z20-477
NPXY60
Z20-257
< 35 µm of open loop Z-motion
Key features:For microscopy
Large aperture
For scanning
Large aperture
For AFM etc.
Compact
Non-magnetic
UHV compatible
Footprint (mm)140 x 140140 x 14060 x 6070 dia.
Height (mm)30303130
Aperture (mm)68 x 6868 x 68None20 dia.
Body MaterialAluminiumStainless SteelAluminium
Maximum Load (kg)5511
Stage Mass (kg)0.870.960.37 
Max Push/Pull Force (N)100/20100/20100/10 
Closed-loop Travel (µm)
  X- & Y-axes:
  Z-axis:

100
10

200
10

50
20

60
20
Open-loop Travel* (µm)
  X- & Y-axes:
  Z-axis:

160
15

240
15

65
35
 
Position Noise (nm)
  X- & Y-axes
  Z-axis

0.3
0.1

0.7
0.1

0.2
0.1

0.4
0.2
Stiffness (N/µm)
  X- & Y-axes
  Z-axis

3.0
6.2

2.8
2.8

3
14
 
Resonant Freq. (kHz)
  X-axis
  Y-axis
  Z-axis

0.60
0.60
0.90

0.40
0.45
0.90

1.20
1.20
2.00

0.75
0.75
2.00
Linearity Deviation (%)
  X- & Y-axes
  Z-axis

0.01
0.02

0.01
0.02

0.01
0.10

0.03
0.05
Settling Time (ms)
  X- & Y-axes
  Z-axis

10
5

15
5

4
2

5
2
Capacitance (µF)
  X- & Y-axes
  Z-axis

4.8
1.0

7.5
1.0

2.8
1.6
2
Integrated SensorCapacitive 
ControllerLC.403
Notes* Open-loop Travel operating at -30 to 150 V

 

XYZ ModelsNPXY100
Z25-102
NPXY100
Z25-264
NPXY200
Z25-103
NPXY200
Z25-260
35 µm of open loop Z-motion
Key features:For metrology
Ultra-precise
For scanning
Large aperture
For microscopy
Large aperture
For metrology
Ultra-precise
Footprint (mm)100 x 100140 x 140100 x 100140 x 140
Height (mm)35
Aperture (mm)38 dia.68 x 6838 dia.68 x 68
Body MaterialAluminium
Maximum Load (kg)1115
Stage Mass (kg)0.56 0.560.96
Max Push/Pull Force (N)100/10 100/20100/20
Closed-loop Travel (µm)
  X- & Y-axes:
  Z-axis:

100
25

100
25

200
25

200
25
Open-loop Travel* (µm)
  X- & Y-axes:
  Z-axis:

130
35
 
270
35

240
35
Position Noise (nm)
  X- & Y-axes
  Z-axis

0.3
0.1

0.3
0.2

0.5
0.1

0.7
0.2
Stiffness (N/µm)
  X- & Y-axes
  Z-axis

1.3
15.5
 
0.5
13.1

2.8
2.7
Resonant Freq. (kHz)
  X- & Y-axis
  Z-axis

0.50
1.60

0.60
0.75

0.35
1.60

0.45
0.75
Linearity Deviation (%)
  X- & Y-axes
  Z-axis

0.01
0.04

0.02
0.02

0.01
0.04

0.01
0.02
Settling Time (ms)
  X- & Y-axes
  Z-axis

8
3

10
5

15
2

15
5
Capacitance (µF)
  X- & Y-axes
  Z-axis

4.8
3.1
 
7.5
3.1

7.5
1.9
Integrated SensorCapacitive Capacitive
ControllerLC.403
Notes* Open-loop Travel operating at -30 to 150 V

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