Triple-Axis Nanopositioners (Deep Z-motion)
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- Model: nPoint Triple-Axis Nanopositioners (Deep)
XYZ nanopositioning piezo stages with deep Z-motion
nPoint Triple Axis Nanopostioners (Up to 135 µm Z-motion)
This range of nPoint 3-axis piezo stages operate with up to 135 µm of Z-motion in open loop mode, and incorporate a unique flexure-guided design to ensure high resonant frequencies while minimising orthogonality and cross-talk errors.
nPoint's nanopositioners are especially designed for numerous motion critical applications. These include scanning and position control in nanolithography, atomic force microscopy (AFM), biophysics, and optical focusing.
Flexible DSP controllers enable easy optimisation and configuration of piezo systems for a variety of applications.
XYZ Models | NPXY100 Z50-244 |
NPXY200 Z50-270 |
NPXY100 Z100-135 |
NPXY200 Z100-271 |
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Up to 135 µm of open loop Z-motion | |||||
Key features: | Large aperture XYZ nanopositioning piezo stages developed for scanning probe and optical microscopy applications | ||||
Footprint (mm) | 140 x 140 | ||||
Height (mm) | 38 | ||||
Aperture (mm) | 68 x 68 | ||||
Body Material | Aluminium | ||||
Maximum Load (kg) | 5 | ||||
Stage Mass (kg) | 1.09 | 1.06 | 0.95 | 0.99 | |
Max Push/Pull Force (N) | 100/20 | ||||
Closed-loop Travel (µm) X- & Y-axes: Z-axis: |
100 50 |
200 50 |
100 100 |
200 100 |
|
Open-loop Travel* (µm) X- & Y-axes: Z-axis: |
160 80 |
240 80 |
175 135 |
240 135 |
|
Position Noise (nm) X- & Y-axes Z-axis |
0.3 0.3 |
0.7 0.3 |
0.3 0.3 |
0.7 0.3 |
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Stiffness (N/µm) X-axis Y-axis Z-axis |
1.6 1.6 4.7 |
1.0 1.8 4.7 |
1.3 1.3 5.6 |
1.5 2.0 5.6 |
|
Resonant Freq. (kHz) X- & Y-axes Z-axis |
0.50 0.55 |
0.45 0.55 |
0.50 0.50 |
0.45 0.50 |
|
Linearity Deviation (%) X- & Y-axes Z-axis |
0.01 0.05 |
0.01 0.02 |
0.01 0.05 |
0.01 0.02 |
|
Settling Time (ms) X- & Y-axes Z-axis |
10 10 |
15 10 |
10 10 |
15 10 |
|
Capacitance (µF) X- & Y-axes Z-axis |
4.8 4.8 |
7.5 4.8 |
4.8 5.5 |
7.5 5.5 |
2 |
Integrated Sensor | Capacitive | ||||
Controller | LC.403 | ||||
Notes | * Open-loop Travel operating at -30 to 150 V |
Standard stage materials are listed. Other materials, including invar, super invar, stainless steel, titanium, and aluminum, are available for some stages. UHV configurations are also available in most products. Please enquire if interested in these options.
File Name | Size | Link |
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Terms and Conditions V6 | 206.45KiB | Download |
A number of papers have been published by scientists around the globe who have used nPoint stages within their research. Here are some examples:
- Continuous scanning mode for ptychography
- Effect of proteoglycans at interfaces as related to location, architecture, and mechanical cues
- nDSE Based Overlay Alignment: Enabling Technology for Nano Metrology and Fabrication
- OMNY—A tOMography Nano crYo stage
- A Discrete-Time Single-Parameter Combined Feedforward/Feedback Adaptive-Delay Algorithm With Applications to Piezo-Based Raster Tracking